Shape and Functional Elements of the Bulk Silicon Microtechnique

Shape and Functional Elements of the Bulk Silicon Microtechnique

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A Manual of Wet-Etched Silicon Structures Joachim FrA¼hauf ... 53 490- 245 262- 50-115 70 Rm [N/mm 16 685 310 Compress 685- 1550- 420- 840 strength 980 2820 2300 6, 13 [N/mm Bending 17 340- 379- ... [gem] 6 6 6 1016 1019 1015 Melting p 14 1460 1185 2046 (1500) (530) Ts [AdC] Temperat 15 400- 400 1700- 1000-anbsp;...


Title:Shape and Functional Elements of the Bulk Silicon Microtechnique
Author: Joachim Frühauf
Publisher:Springer Science & Business Media - 2005-12-05
ISBN-13:

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